A semiconductor plant in Taiwan is using
Liqui-Cel® Membrane Contactors to remove
dissolved gas from their ultra pure water (UPW)
system. The UPW system is used to purify
water used in the chemical mechanical polishing
process (CMP) at the fab.
Semiconductor Plant Improves Water Quality By Using Liqui-Cel® Membrane Contactors For Simultaneous Oxygen And Carbon Dioxide Removal From Water
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