News | May 26, 2005

Membrana Supplies Liqui-Cel® Membrane Contactors For Degassing Water At Large Semiconductor Plant In China

Source: 3M Separation and Purification Sciences Division
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Charlotte, NC. USA. — Membrana-Charlotte announced that Liqui-Cel Membrane Contactors have been chosen to deaerate ultrapure water at a major semiconductor fab in China. The Contactors will operate in combo mode where a small nitrogen sweep and vacuum will be used. The contactors will be used to remove dissolved oxygen to less than 1 part per billion (ppb).

A Liqui-Cel Contactor system will be installed in two lines at this plant. The first line will degas 200 m3/hr (880 gpm) and the second line will degas 140 m3/hr (616 gpm). The contactors will ship out this month and the system is scheduled to begin degassing water in Q3 2005. The contactors will be used to deaerate the water used to manufacture DRAM and other memory storage devices.

Liqui-Cel Membrane Contactors are used around the world for adding or removing Oxygen (O2), Carbon Dioxide (CO2) and Nitrogen (N2) to or from different liquids in the Semiconductor, Power, Pharmaceutical, Photographic, Food and Beverage, Ink Jet and many other industries. For example, it is known that O2 negatively impacts many processes; it is corrosive and can oxidize materials. In the power and industrial areas, piping and equipment are susceptible to corrosion. Specifically to the semiconductor market, high levels of O2 can cause lower wafer yields. Additionally, CO2 negatively impacts performance of EDI and Ion Exchange. The Liqui-Cel Contactors offer a modular solution for O2/CO2 removal before these processes without chemicals.

Liqui-Cel Contactors are also used to add gasses to liquids to enhance megasonic cleaning. The beverage industry looks to membrane contactors for carbonation, nitrogenation and O2 removal. These reflect only a few examples of the variety of applications where the Liqui-Cel Membrane Contactors are used. New applications are constantly being developed.

Membrana´s Industrial Membrane Group also manufactures a variety of membranes used for filtration in various industries and applications. There are ten strategically located manufacturing facilities in the USA, Europe and Asia and global markets are served through sales offices in North and South America, Europe, Japan, Australia, South East Asia and China.

SOURCE: 3M Separation and Purification Sciences Division

3M Separation and Purification Sciences Division